By John G. Webster (Editor)

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117–127, 1969. 39. M. Andrews, I. Harris, G. Turner, A comparison of squeeze-film theory with measurements on a microstructure, Sensors and Actuators A, Vol. 26: pp. 79–87, 1993. 40. H. Hosaka, K. Itao and S. Kuroda, Damping characteristics of beam shaped micro-oscillators, Sensors and Actuators A, 49: pp. 87–95, 1995. 41. M. Andrews, I. Harris and G. Turner, A comparison of squeeze film theory damping with measuremnts on a microstructure, Sensors and Actuators A, 36: pp. 79–87, 1993. 42. J. G. Eisley, Nonlinear vibration of beams and rectangular plates, J.

Andrews, I. Harris and G. Turner, A comparison of squeeze film theory damping with measuremnts on a microstructure, Sensors and Actuators A, 36: pp. 79–87, 1993. 42. J. G. Eisley, Nonlinear vibration of beams and rectangular plates, J. of Appl. Mathematics and Physics, 15: pp. 167–175, 1964. 43. M. V. Andres, K. H. W. Foulds and M. J. Tudor, Nonlinear vibrations and hysteresis of micromachined silicon resonators designed as frequency out sensors, Electronics Letters, 23 (18): pp. 952–954, 1987. 44.

26: pp. 79–87, 1993. 40. H. Hosaka, K. Itao and S. Kuroda, Damping characteristics of beam shaped micro-oscillators, Sensors and Actuators A, 49: pp. 87–95, 1995. 41. M. Andrews, I. Harris and G. Turner, A comparison of squeeze film theory damping with measuremnts on a microstructure, Sensors and Actuators A, 36: pp. 79–87, 1993. 42. J. G. Eisley, Nonlinear vibration of beams and rectangular plates, J. of Appl. Mathematics and Physics, 15: pp. 167–175, 1964. 43. M. V. Andres, K. H. W. Foulds and M.

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35.Microelectromechanical Systems by John G. Webster (Editor)


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